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Levitronix® LFS
Ultrasonic High-Precision
Flow Measurement
for Microelectronics
Wet Applications

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Spare Part
100-30314

LFC-1C (Single Channel)

LFC-1C (Single Channel)

Sensor Size
LFS-04(H) -08(H) -20(H) -50(H) -80(H); LFSC-05(D) -08(D) -12(D) -22(D) -30(D)
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Spare Part
100-30337

LFC-6CIO (6-Channels with I/O Interfaces)

LFC-6CIO (6-Channels with I/O Interfaces)

Sensor Size
LFS-008 -04(H) -08(H) -20(H) -50(H) -80(H); LFSC-05(D) -08(D) -12(D) -22(D) -30(D)
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Spare Part
100-30315

LFC-6C (6-Channels)

LFC-6C (6-Channels)

Sensor Size
LFS-04(H) -08(H) -20(H) -50(H) -80(H)
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Spare Part
100-30312

LFS-80-Z

LFS-80-Z

Flow Range Sensor (l/min)
18.8 - 80 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
1”
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-30311

LFS-50-U

LFS-50-U

Flow Range Sensor (l/min)
10.6 - 50 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
3/4”
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-30306

LFS-08-Z

LFS-08-Z

Flow Range Sensor (l/min)
1.7 - 8 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8-40 mm²/s
Fitting Size
3/8"
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-30309

LFS-20-U

LFS-20-U

Flow Range Sensor (l/min)
4.7 - 20 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8-40 mm²/s
Fitting Size
1/2”
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-30313

LFS-80-U

LFS-80-U

Flow Range Sensor (l/min)
18.8 - 80 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
1”
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-30373

LFS-20H-U

LFS-20H-U

Flow Range Sensor (l/min)
4.7 - 20 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
1/2”
Max. Liquid Temperature
180°C / 356°F
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Spare Part
100-30372

LFS-20H-Z

LFS-20H-Z

Flow Range Sensor (l/min)
4.7 - 20 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
1/2”
Max. Liquid Temperature
180°C / 356°F
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Spare Part
100-30343

LFS-80H-U

LFS-80H-U

Flow Range Sensor (l/min)
18.8 - 80 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
1”
Max. Liquid Temperature
180°C / 356°F
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Spare Part
100-30342

LFS-80H-Z

LFS-80H-Z

Flow Range Sensor (l/min)
18.8 - 80 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
1”
Max. Liquid Temperature
180°C / 356°F
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Spare Part
100-30341

LFS-50H-U

LFS-50H-U

Flow Range Sensor (l/min)
10.6 - 50 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
3/4”
Max. Liquid Temperature
180°C / 356°F
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Spare Part
100-30340

LFS-50H-Z

LFS-50H-Z

Flow Range Sensor (l/min)
10.6 - 50 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
3/4”
Max. Liquid Temperature
180°C / 356°F
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Spare Part
100-30333

LFS-08H-U

LFS-08H-U

Flow Range Sensor (l/min)
1.7 - 8 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
3/8"
Max. Liquid Temperature
180°C / 356°F
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Spare Part
100-30332

LFS-08H-Z

LFS-08H-Z

Flow Range Sensor (l/min)
1.7 - 8 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
3/8"
Max. Liquid Temperature
180°C / 356°F
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Spare Part
100-30331

LFS-04H-U

LFS-04H-U

Flow Range Sensor (l/min)
0.8 - 4 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
3/8"
Max. Liquid Temperature
180°C / 356°F
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Spare Part
100-30330

LFS-04H-Z

LFS-04H-Z

Flow Range Sensor (l/min)
0.8 - 4 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
3/8"
Max. Liquid Temperature
180°C / 356°F
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Spare Part
100-30325

LFC-1C-F4 (Single Channel)

LFC-1C-F4 (Single Channel)

Sensor Size
LFS-008
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Spare Part
100-30324

LFS-008-U

LFS-008-U

Flow Range Sensor (l/min)
0.035 - 0.8 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
1/4”
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-30323

LFS-008-Z

LFS-008-Z

Flow Range Sensor (l/min)
0.035 - 0.8 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
1/4”
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-30322

LFS-04-U-T025

LFS-04-U-T025

Flow Range Sensor (l/min)
0.8 - 4 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
1/4”
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-30321

LFS-04-Z-T025

LFS-04-Z-T025

Flow Range Sensor (l/min)
0.8 - 4 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
1/4”
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-30310

LFS-50-Z

LFS-50-Z

Flow Range Sensor (l/min)
10.6 - 50 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8 - 40 mm²/s
Fitting Size
3/4”
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-30308

LFS-20-Z

LFS-20-Z

Flow Range Sensor (l/min)
4.7 - 20 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8-40 mm²/s
Fitting Size
1/2”
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-30307

LFS-08-U

LFS-08-U

Flow Range Sensor (l/min)
1.7 - 8 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8-40 mm²/s
Fitting Size
3/8"
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-30305

LFS-04-U

LFS-04-U

Flow Range Sensor (l/min)
0.8 - 4 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8-40 mm²/s
Fitting Size
3/8"
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-30304

LFS-04-Z

LFS-04-Z

Flow Range Sensor (l/min)
0.8 - 4 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8-40 mm²/s
Fitting Size
3/8"
Max. Liquid Temperature
90°C / 194°F
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