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Levitronix® BPS-iF
Ultrapure Bearingless
Flow Controllers
for Microelectronics
Wet Applications

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Spare Part
100-90708

Pump Head LPP-200.7

Pump Head LPP-200.7

Max. Flow (l/min)
20
Max. diff. Pressure (bar)
2
Max. Viscosity
20 cP
Fitting Size
1/2”
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100-30306

LFS-08-Z

LFS-08-Z

Flow Range Sensor (l/min)
1.7 - 8 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8-40 mm²/s
Fitting Size
3/8"
Max. Liquid Temperature
90°C / 194°F
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100-30309

LFS-20-U

LFS-20-U

Flow Range Sensor (l/min)
4.7 - 20 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8-40 mm²/s
Fitting Size
1/2”
Max. Liquid Temperature
90°C / 194°F
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100-91213

Pump Head LPP-30.3 (High Pressure)

Pump Head LPP-30.3 (High Pressure)

Max. Flow (l/min)
3.8
Max. diff. Pressure (bar)
2.8
Max. Viscosity
10 cP
Fitting Size
3/8"
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100-90828

Pump Head LPP-30.1

Pump Head LPP-30.1

Max. Flow (l/min)
7.4
Max. diff. Pressure (bar)
1.5
Max. Viscosity
10 cP
Fitting Size
3/8"
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100-30486

LeviFlow Sensor LFS-04L-Z-PC-F1-SC1

LeviFlow Sensor LFS-04L-Z-PC-F1-SC1

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.3-40 mm²/s
Max. Pressure (bar)
5
Fitting Size
3/8"
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100-30466

LeviFlow Sensor LFS-04L-U-PC-F1-SC1

LeviFlow Sensor LFS-04L-U-PC-F1-SC1

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.3-40 mm²/s
Max. Pressure (bar)
5
Fitting Size
3/8"
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100-30429

LeviFlow Sensor LFS-04L-Z-F1-SC1

LeviFlow Sensor LFS-04L-Z-F1-SC1

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.3-40 mm²/s
Max. Pressure (bar)
5
Fitting Size
3/8"
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100-30427

LeviFlow Sensor LFS-04L-U-F1-SC1

LeviFlow Sensor LFS-04L-U-F1-SC1

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.3-40 mm²/s
Max. Pressure (bar)
5
Fitting Size
3/8"
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Spare Part
100-30308

LFS-20-Z

LFS-20-Z

Flow Range Sensor (l/min)
4.7 - 20 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8-40 mm²/s
Fitting Size
1/2”
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-30307

LFS-08-U

LFS-08-U

Flow Range Sensor (l/min)
1.7 - 8 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8-40 mm²/s
Fitting Size
3/8"
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-30305

LFS-04-U

LFS-04-U

Flow Range Sensor (l/min)
0.8 - 4 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8-40 mm²/s
Fitting Size
3/8"
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-30304

LFS-04-Z

LFS-04-Z

Flow Range Sensor (l/min)
0.8 - 4 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
0.8-40 mm²/s
Fitting Size
3/8"
Max. Liquid Temperature
90°C / 194°F
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Spare Part
100-10178

Integrated Flow Control Driver IFD-30.9-50-03 (OEM Model, ATEX, High Pressure)

Integrated Flow Control Driver IFD-30.9-50-03 (OEM Model, ATEX, High Pressure)

Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Spare Part
100-10177

Integrated Flow Control Driver IFD-30.7-03 (EasyConnect, High Pressure)

Integrated Flow Control Driver IFD-30.7-03 (EasyConnect, High Pressure)

Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Spare Part
100-10176

Integrated Flow Control Driver IFD-30.7-01 (EasyConnect)

Integrated Flow Control Driver IFD-30.7-01 (EasyConnect)

Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Spare Part
100-10175

Integrated Flow Control Driver IFD-30.5-03 (Stand-Alone Model, High Pressure)

Integrated Flow Control Driver IFD-30.5-03 (Stand-Alone Model, High Pressure)

Service/Control Interface
Button Controle Mode
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Spare Part
100-10174

Integrated Flow Control Driver IFD-30.5-01 (Stand-Alone Model)

Integrated Flow Control Driver IFD-30.5-01 (Stand-Alone Model)

Service/Control Interface
Button Controle Mode
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Spare Part
100-10173

Integrated Flow Control Driver IFD-30.4-03 (EasyConnect, High Pressure)

Integrated Flow Control Driver IFD-30.4-03 (EasyConnect, High Pressure)

Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Spare Part
100-10172

Integrated Flow Control Driver IFD-30.4-01 (EasyConnect)

Integrated Flow Control Driver IFD-30.4-01 (EasyConnect)

Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Spare Part
100-10158

Integrated Flow Control Driver IFD-30.9-50-01 (OEM Model, ATEX)

Integrated Flow Control Driver IFD-30.9-50-01 (OEM Model, ATEX)

Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Spare Part
100-10152

Integrated Flow Control Driver IFD-100.8-50-01 (ATEX)

Integrated Flow Control Driver IFD-100.8-50-01 (ATEX)

Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Spare Part
100-10143

Integrated Flow Control Driver IFD-30.2-50-03 (OEM Model, High Pressure)

Integrated Flow Control Driver IFD-30.2-50-03 (OEM Model, High Pressure)

Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Spare Part
100-10142

Integrated Flow Control Driver IFD-30.1-50-03 (OEM Model, High Pressure)

Integrated Flow Control Driver IFD-30.1-50-03 (OEM Model, High Pressure)

Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Spare Part
100-10099

Integrated Flow Control Driver IFD-30.2-50-01 (OEM Model)

Integrated Flow Control Driver IFD-30.2-50-01 (OEM Model)

Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Spare Part
100-10094

Integrated Flow Control Driver IFD-30.1-50-01 (OEM Model)

Integrated Flow Control Driver IFD-30.1-50-01 (OEM Model)

Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Spare Part
100-10080

Integrated Flow Control Driver IFD-100.2-50-01

Integrated Flow Control Driver IFD-100.2-50-01

Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Spare Part
100-10079

Integrated Flow Control Driver IFD-100.1-50-01

Integrated Flow Control Driver IFD-100.1-50-01

Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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