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Levitronix® BPS-iF
Ultrapure Bearingless
Flow Controllers
for Microelectronics
Wet Applications

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Flow Control System
100-91393

Flow Control System BPS-iF30.12-04UPCSC1 (Stand-Alone Model, High Pressure)

Flow Control System BPS-iF30.12-04UPCSC1 (Stand-Alone Model, High Pressure)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
3.8
Max. diff. Pressure (bar)
2.8
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
Button Controle Mode
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Flow Control System
100-91392

Flow Control System BPS-iF30.12-04ZPCSC1 (Stand-Alone Model, High Pressure)

Flow Control System BPS-iF30.12-04ZPCSC1 (Stand-Alone Model, High Pressure)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
3.8
Max. diff. Pressure (bar)
2.8
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
Button Controle Mode
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Flow Control System
100-91391

Flow Control System BPS-iF30.11-04UPCSC1 (Stand-Alone Model)

Flow Control System BPS-iF30.11-04UPCSC1 (Stand-Alone Model)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
7.4
Max. diff. Pressure (bar)
1.5
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
Button Controle Mode
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Flow Control System
100-91390

Flow Control System BPS-iF30.11-04ZPCSC1 (Stand-Alone Model)

Flow Control System BPS-iF30.11-04ZPCSC1 (Stand-Alone Model)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
7.4
Max. diff. Pressure (bar)
1.5
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
Button Controle Mode
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Flow Control System
100-91389

Flow Control System BPS-iF30.10-04UPCSC1 (EasyConnect Model, High Pressure)

Flow Control System BPS-iF30.10-04UPCSC1 (EasyConnect Model, High Pressure)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
3.8
Max. diff. Pressure (bar)
2.8
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91388

Flow Control System BPS-iF30.10-04ZPCSC1 (EasyConnect Model, High Pressure)

Flow Control System BPS-iF30.10-04ZPCSC1 (EasyConnect Model, High Pressure)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
3.8
Max. diff. Pressure (bar)
2.8
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91387

Flow Control System BPS-iF30.9-04UPCSC1 (EasyConnect Model, High Pressure)

Flow Control System BPS-iF30.9-04UPCSC1 (EasyConnect Model, High Pressure)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
3.8
Max. diff. Pressure (bar)
2.8
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91386

Flow Control System BPS-iF30.9-04ZPCSC1 (EasyConnect Model, High Pressure)

Flow Control System BPS-iF30.9-04ZPCSC1 (EasyConnect Model, High Pressure)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
3.8
Max. diff. Pressure (bar)
2.8
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91385

Flow Control System BPS-iF30.8-04UPCSC1 (EasyConnect Model)

Flow Control System BPS-iF30.8-04UPCSC1 (EasyConnect Model)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
7.4
Max. diff. Pressure (bar)
1.5
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91384

Flow Control System BPS-iF30.8-04PCZSC1 (EasyConnect Model)

Flow Control System BPS-iF30.8-04PCZSC1 (EasyConnect Model)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
7.4
Max. diff. Pressure (bar)
1.5
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91383

Flow Control System BPS-iF30.7-04UPCSC1 (EasyConnect Model)

Flow Control System BPS-iF30.7-04UPCSC1 (EasyConnect Model)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
7.4
Max. diff. Pressure (bar)
1.5
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91382

Flow Control System BPS-iF30.7-04ZPCSC1 (EasyConnect Model)

Flow Control System BPS-iF30.7-04ZPCSC1 (EasyConnect Model)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
7.4
Max. diff. Pressure (bar)
1.5
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91381

Flow Control System BPS-iF30.6-04USC1 (OEM, ATEX/IECEx Model, High Pressure)

Flow Control System BPS-iF30.6-04USC1 (OEM, ATEX/IECEx Model, High Pressure)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
3.8
Max. diff. Pressure (bar)
2.8
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91380

Flow Control System BPS-iF30.6-04ZSC1 (OEM, ATEX/IECEx Model, High Pressure)

Flow Control System BPS-iF30.6-04ZSC1 (OEM, ATEX/IECEx Model, High Pressure)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
3.8
Max. diff. Pressure (bar)
2.8
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91379

Flow Control System BPS-iF30.5-04USC1 (OEM, ATEX/IECEx Model)

Flow Control System BPS-iF30.5-04USC1 (OEM, ATEX/IECEx Model)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
7.4
Max. diff. Pressure (bar)
1.5
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91378

Flow Control System BPS-iF30.5-04ZSC1 (OEM, ATEX/IECEx Model)

Flow Control System BPS-iF30.5-04ZSC1 (OEM, ATEX/IECEx Model)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
7.4
Max. diff. Pressure (bar)
1.5
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91371

Flow Control System BPS-iF100.4-20U (ATEX/IECEx)

Flow Control System BPS-iF100.4-20U (ATEX/IECEx)

Flow Range Sensor (l/min)
4.7 - 20 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 1/2”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91370

Flow Control System BPS-iF100.4-20Z (ATEX/IECEx)

Flow Control System BPS-iF100.4-20Z (ATEX/IECEx)

Flow Range Sensor (l/min)
4.7 - 20 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 1/2”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91369

Flow Control System BPS-iF100.4-08U (ATEX/IECEx)

Flow Control System BPS-iF100.4-08U (ATEX/IECEx)

Flow Range Sensor (l/min)
20
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91368

Flow Control System BPS-iF100.4-08Z (ATEX/IECEx)

Flow Control System BPS-iF100.4-08Z (ATEX/IECEx)

Flow Range Sensor (l/min)
20
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91367

Flow Control System BPS-iF100.4-04U (ATEX/IECEx)

Flow Control System BPS-iF100.4-04U (ATEX/IECEx)

Flow Range Sensor (l/min)
20
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91366

Flow Control System BPS-iF100.4-04Z (ATEX/IECEx)

Flow Control System BPS-iF100.4-04Z (ATEX/IECEx)

Flow Range Sensor (l/min)
20
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91282

Flow Control System BPS-iF30.4-04USC1 (OEM Model, High Pressure)

Flow Control System BPS-iF30.4-04USC1 (OEM Model, High Pressure)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
3.8
Max. diff. Pressure (bar)
2.8
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91281

Flow Control System BPS-iF30.4-04ZSC1 (OEM Model, High Pressure)

Flow Control System BPS-iF30.4-04ZSC1 (OEM Model, High Pressure)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
3.8
Max. diff. Pressure (bar)
2.8
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91280

Flow Control System BPS-iF30.3-04USC1 (OEM Model, High Pressure)

Flow Control System BPS-iF30.3-04USC1 (OEM Model, High Pressure)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
3.8
Max. diff. Pressure (bar)
2.8
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91279

Flow Control System BPS-iF30.3-04ZSC1 (OEM Model, High Pressure)

Flow Control System BPS-iF30.3-04ZSC1 (OEM Model, High Pressure)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
3.8
Max. diff. Pressure (bar)
2.8
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91030

Flow Control System BPS-iF30.2-04USC1 (OEM Model)

Flow Control System BPS-iF30.2-04USC1 (OEM Model)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
7.4
Max. diff. Pressure (bar)
1.5
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91029

Flow Control System BPS-iF30.2-04ZSC1 (OEM Model)

Flow Control System BPS-iF30.2-04ZSC1 (OEM Model)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
7.4
Max. diff. Pressure (bar)
1.5
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91028

Flow Control System BPS-iF30.1-04USC1 (OEM Model)

Flow Control System BPS-iF30.1-04USC1 (OEM Model)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
7.4
Max. diff. Pressure (bar)
1.5
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91027

Flow Control System BPS-iF30.1-04ZSC1 (OEM Model)

Flow Control System BPS-iF30.1-04ZSC1 (OEM Model)

Flow Range Sensor (l/min)
0.035 - 4 (Accuracy of +/- 1%)
Max. Flow (l/min)
7.4
Max. diff. Pressure (bar)
1.5
Max. Viscosity
10 cP
Fitting Size
3/8” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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