评估了传统批次和单晶圆处理器的清洁工艺性能。本研究进行的实验主要针对使用各种泵输送方法对晶圆上颗粒数量增加进行判断。特别是，调查了泵脱落颗粒对DI水中硅芯片清洁的影响。不稳定的ICs产量评估包括颗粒数和各种相关性(negative binomial model)。
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Microelectronics Pumps (BPS Series) 
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