事实 将流率传感器的接液表面暴露在酸性化学物质中，会导致从微量金属渗出。微量金属污染可导致半导体组件的电气性能发生改变。
测试条件 流量传感器 LFS-20 和 LFS-80 充满 UPW。在UPW中测量所有微量金属水平, 活性二氧化硅和离子不纯物。
结果 对于这两个传感器，所有测量级别均在Semi F40/F57 的规格范围内
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