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Levitronix® BPS-iF
Ultrapure Bearingless
Flow Controllers
for Microelectronics
Wet Applications

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Flow Control System
100-90922

Flowcontrol System BPS-iF100.1-20U

Flowcontrol System BPS-iF100.1-20U

Flow Range Sensor (l/min)
4.7 - 20 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 1/2”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91371

Flow Control System BPS-iF100.4-20U (ATEX/IECEx)

Flow Control System BPS-iF100.4-20U (ATEX/IECEx)

Flow Range Sensor (l/min)
4.7 - 20 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 1/2”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91370

Flow Control System BPS-iF100.4-20Z (ATEX/IECEx)

Flow Control System BPS-iF100.4-20Z (ATEX/IECEx)

Flow Range Sensor (l/min)
4.7 - 20 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 1/2”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91369

Flow Control System BPS-iF100.4-08U (ATEX/IECEx)

Flow Control System BPS-iF100.4-08U (ATEX/IECEx)

Flow Range Sensor (l/min)
20
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91368

Flow Control System BPS-iF100.4-08Z (ATEX/IECEx)

Flow Control System BPS-iF100.4-08Z (ATEX/IECEx)

Flow Range Sensor (l/min)
20
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91367

Flow Control System BPS-iF100.4-04U (ATEX/IECEx)

Flow Control System BPS-iF100.4-04U (ATEX/IECEx)

Flow Range Sensor (l/min)
20
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-91366

Flow Control System BPS-iF100.4-04Z (ATEX/IECEx)

Flow Control System BPS-iF100.4-04Z (ATEX/IECEx)

Flow Range Sensor (l/min)
20
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-90926

Flow Control System BPS-iF100.2-20U

Flow Control System BPS-iF100.2-20U

Flow Range Sensor (l/min)
4.7 - 20 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 1/2”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-90925

Flow Control System BPS-iF100.2-20Z

Flow Control System BPS-iF100.2-20Z

Flow Range Sensor (l/min)
4.7 - 20 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 1/2”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-90877

Flow Control System BPS-iF100.1-04Z

Flow Control System BPS-iF100.1-04Z

Flow Range Sensor (l/min)
20
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-90921

Flowcontrol System BPS-iF100.1-20Z

Flowcontrol System BPS-iF100.1-20Z

Flow Range Sensor (l/min)
4.7 - 20 (Accuracy of +/- 1%)
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 1/2”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-90924

Flow Control System BPS-iF100.2-08U

Flow Control System BPS-iF100.2-08U

Flow Range Sensor (l/min)
20
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-90923

Flow Control System BPS-iF100.2-08Z

Flow Control System BPS-iF100.2-08Z

Flow Range Sensor (l/min)
20
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-90920

Flow Control System BPS-iF100.1-08U

Flow Control System BPS-iF100.1-08U

Flow Range Sensor (l/min)
20
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-90919

Flow Control System BPS-iF100.1-08Z

Flow Control System BPS-iF100.1-08Z

Flow Range Sensor (l/min)
20
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-90880

Flow Control System BPS-iF100.2-04U

Flow Control System BPS-iF100.2-04U

Flow Range Sensor (l/min)
20
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
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Flow Control System
100-90879

Flow Control System BPS-iF100.2-04Z

Flow Control System BPS-iF100.2-04Z

Flow Range Sensor (l/min)
20
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
In Favorites
Add to favorites
Flow Control System
100-90878

Flow Control System BPS-iF100.1-04U

Flow Control System BPS-iF100.1-04U

Flow Range Sensor (l/min)
20
Max. Viscosity (mm²/s)
20 cP
Max. Pressure (bar)
2
Max. Flow (l/min)
20
Fitting Size
1/2” (Sensor: 3/8”)
Service/Control Interface
RS485 with Modbus protocol and PLC Interface
In Favorites
Add to favorites