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Microelectronics

With ever-increasing miniaturization and complexity, process requirements in microelectronics wet applications have become more and more stringent. A plethora of different media is necessary to cover the different processes in areas such as semiconductor manufacturing, photovoltaics, or LED. Ultrapure, safe, and reliable delivery of critical process media is of paramount importance.

Levitronix® has been a key participant in the Microelectronics industry for over 20 years, providing ultrapure pump systems, mixers, and flow sensors that enable chip manufacturers globally to process smallest wafer structures.

Process Overview

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APPLICATIONS

Microelectronics

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Bulk Chemical Delivery
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CMP Slurry Delivery
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Cleaning
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Plating