High shear flow generated by positive displacement pumps increases the distribution of oversized particles, leading to significantly increased wafer surface defectivity (scratches or roughness) during CMP, whereas less defectivity was found in slurries circulated by a magnetically levitated (maglev) centrifugal pump.
Microelectronics Pumps (BPS Series) 
Bioprocessing Pumps (Single-Use) 
Microelectronics Fans 
Control Units