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ltx 979 1590

Cabot® EP-6618 颗粒大小分布于四种不同泵比较

Keywords:
  • Microelectronics
  • CMP
  • Slurry
  • Pump Comparison
  • Pneumatic Pumps
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事实
与 Levitronix® 泵相比,气动泵由于逆止阀门和其他部件而会产生剪切力。泵中的剪切力可导致slurry聚集。而聚集的slurry颗粒可导致微刮痕,进而导致 CMP 中的晶圆缺陷。

测试条件
评估了两台Levitronix® 泵、一台隔膜泵和一台波纹管泵,以评估它们对Cabot®EP-6618泥浆的健康的影响。固定容积的slurry在26 lpm和2bar 持续循环,样本在定义的时间从系统中抽取并分析。测量了每个样本的颗粒大小分布,并将每个颗粒大小的浓度与初始浓度进行比较.

结果
无论颗粒大小如何,Levitronix® 泵的颗粒大小分布变化不大。通过波纹管和隔膜泵,观察到显著增加,特别是在大颗粒浓度方面。

particle-concentrations-relative-to-the-initial-concentration-for-selected-size-channels-bps-4

Particle concentrations relative to the initial concentration for selected size channels

particle-concentrations-relative-to-the-initial-concentration-for-selected-size-channels-diaphragm-pump

Particle concentrations relative to the initial concentration for selected size channels

particle-concentrations-relative-to-the-initial-concentration-for-selected-size-channels-bellows-pump

Particle concentrations relative to the initial concentration for selected size channel

 

Author Marc Litchy
Company CT Associates
Document Number LTX 979 1590
Pages 8