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Leachout Test LEVIFLOW® Flow Sensors according to Semi F40/F57

  • 流量センサ
  • マイクロエレクトロニクス
  • 粒子の脱落
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Exposure of the flow sensor’s wet surface to acid chemicals can result in leach out of trace metals. Trace metal contamination can cause alteration of electrical properties in semiconductor devices.

Test Conditions
The flow sensors LFS-20 and LFS-80 were filled with UPW. The levels of all metals, reactive silica, and anion impurities were measured in the used UPW.

For both sensors, all measured levels were within the specification of Semi F40/F57.

Author M. Reutz, R. Braitmayer
Company ATU GmbH
Document Number 0910 066
Pages 3