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Levitronix® BPS Anti-Static
Ultrapure Bearingless Pumps
for Microelectronics
Wet Applications


 

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Pump System
100-91322

Pump System BPS-600.51 (Stand-Alone, ATEX/IECEx)

Pump System BPS-600.51 (Stand-Alone, ATEX/IECEx)

Max. Flow (l/min)
75
Max. diff. Pressure (bar)
3.2
Max. Viscosity
30 cP
Max. Liquid Temperature
90°C / 194°F
Service/Control Interface
Button Control Mode
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Pump System
100-91323

Pump System BPS-600.52 (ATEX/IECEx)

Pump System BPS-600.52 (ATEX/IECEx)

Max. Flow (l/min)
75
Max. diff. Pressure (bar)
3.2
Max. Viscosity
30 cP
Max. Liquid Temperature
90°C / 194°F
Service/Control Interface
USB and PLC Interface
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Pump System
100-91324

Pump System BPS-600.53 (ATEX/IECEx)

Pump System BPS-600.53 (ATEX/IECEx)

Max. Flow (l/min)
75
Max. diff. Pressure (bar)
3.2
Max. Viscosity
30 cP
Max. Liquid Temperature
90°C / 194°F
Service/Control Interface
RS232 and PLC Interface
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