1.0Levitronixhttps://shoplevitronix.com/ja/Sabrina Muellerhttps://shoplevitronix.com/ja/author/sabrina-mueller/rich600338<blockquote class="wp-embedded-content" data-secret="demmChuetv"><a href="https://shoplevitronix.com/ja/media-center/793/">Comparison of Three Pump Systems on the Particle Size Distribution of Cabot^® WIN W7300-A18 Slurry</a></blockquote><iframe sandbox="allow-scripts" security="restricted" src="https://shoplevitronix.com/ja/media-center/793/embed/#?secret=demmChuetv" width="600" height="338" title="“Comparison of Three Pump Systems on the Particle Size Distribution of Cabot^® WIN W7300-A18 Slurry” — Levitronix" data-secret="demmChuetv" frameborder="0" marginwidth="0" marginheight="0" scrolling="no" class="wp-embedded-content"></iframe><script type="text/javascript"> /* <![CDATA[ */ /*! This file is auto-generated */ !function(d,l){"use strict";l.querySelector&&d.addEventListener&&"undefined"!=typeof URL&&(d.wp=d.wp||{},d.wp.receiveEmbedMessage||(d.wp.receiveEmbedMessage=function(e){var t=e.data;if((t||t.secret||t.message||t.value)&&!/[^a-zA-Z0-9]/.test(t.secret)){for(var s,r,n,a=l.querySelectorAll('iframe[data-secret="'+t.secret+'"]'),o=l.querySelectorAll('blockquote[data-secret="'+t.secret+'"]'),c=new RegExp("^https?:$","i"),i=0;i<o.length;i++)o[i].style.display="none";for(i=0;i<a.length;i++)s=a[i],e.source===s.contentWindow&&(s.removeAttribute("style"),"height"===t.message?(1e3<(r=parseInt(t.value,10))?r=1e3:~~r<200&&(r=200),s.height=r):"link"===t.message&&(r=new URL(s.getAttribute("src")),n=new URL(t.value),c.test(n.protocol))&&n.host===r.host&&l.activeElement===s&&(d.top.location.href=t.value))}},d.addEventListener("message",d.wp.receiveEmbedMessage,!1),l.addEventListener("DOMContentLoaded",function(){for(var e,t,s=l.querySelectorAll("iframe.wp-embedded-content"),r=0;r<s.length;r++)(t=(e=s[r]).getAttribute("data-secret"))||(t=Math.random().toString(36).substring(2,12),e.src+="#?secret="+t,e.setAttribute("data-secret",t)),e.contentWindow.postMessage({message:"ready",secret:t},"*")},!1)))}(window,document); /* ]]> */ </script> https://shoplevitronix.com/app/uploads/2021/01/LTX-1116-2097-e1611327275371.png185250Facts In comparison to Levitronix® pumps, pneumatic pumps can cause shear stress due to check valves and other components. Shear stress in pumps can cause slurry agglomeration. Agglomerated slurry particles can lead to micro scratches, which cause wafer defectivity in CMP. Test conditions A Levitronix® BPS-4 pump, a diaphragm pump, and a bellows pump were […]